Vacuum ultraviolet (VUV) lamps are provided having an ultraviolet radiation chamber that generates ultraviolet photons with a gas selected from the group consisting of: argon (Ar), krypton (Kr), xenon (Xe), and combinations thereof. A transmissive window is disposed adjacent to the ultraviolet radiation chamber and permits ultraviolet photons to pass therethrough. The transmissive window comprises a primary layer of a first material selected from the group consisting of: magnesium fluoride, calcium fluoride, lithium fluoride, and combinations thereof. At least one protective layer comprises a transmissive dielectric material selected from the group consisting of: silicon dioxide (SiO2), silicon nitride (Si3N4), aluminum oxide (Al2O3), and combinations thereof. Methods of making the VUV lamps, as well as regenerable VUV lamps with a regenerator component, such as a heater or deep ultraviolet (DUV) radiation source are also provided. The VUV lamps may be incorporated into photoionization detectors (PIDs), including microfabricated microfluidic PIDs.
- 출원번호 : US2024/022212
- 출원인 : THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- 특허번호 :
- IPC : H01J-061/30(2006.01);H01J-061/16(2006.01);G01N-027/64(2006.01);