The invention relates to a microscanner system, comprising: a microscanner formed in a substrate (105), in particular in a semiconductor chip, and having a deflection element (130) which is suspended in a rotationally oscillating manner about at least one oscillation axis and which has a surface in the form of a mirror surface for deflecting electromagnetic radiation incident on the mirror surface; a radiation source (125), in particular a laser radiation source, for emitting an electromagnetic beam to be reflected at the deflection element; and a deflection device (145) for deflecting the electromagnetic beam emitted by the radiation source onto the mirror surface. The radiation source is arranged and orientated in such a way that a beam path of the beam runs at least partially through a radiation transmission area in the substrate to the deflection device.

• 출원번호 : EP2024/066117
• 출원인 : OQMENTED GMBH
• 특허번호 :
• IPC : G02B-026/08(2006.01);G02B-026/10(2006.01);G02B-027/01(2006.01);

The invention relates to a method for manufacturing a projection lens for imaging a pattern arranged in an object plane of the projection lens onto an image plane of the projection lens, said method comprising the following steps: assembling the projection lens by arranging a plurality of optical elements in accordance with a specification in such a way that optical surfaces of the optical elements form a projection beam path through which a pattern arranged in the object plane can be imaged onto the image plane by means of the optical elements, wherein at least one manipulator of a wavefront manipulation system is integrated in order to dynamically influence the wavefront of the projection radiation in response to control signals from a control unit of the wavefront manipulation system, wherein the manipulator comprises at least one manipulator element having at least one manipulator surface arranged in the projection beam path, and comprises an actuating device, which can be controlled by control signals from the control unit, for reversibly altering the optical effect of the manipulator element; measuring the projection lens, involving spatially resolved determination of the wavefront, for the spatially resolved determination of wavefront errors, wherein the manipulator element has a starting configuration during the measurement; calculating a first configuration of the manipulator element, which first configuration is suitable for correcting the wavefront errors; defining a first operating mode of the control unit, wherein, in the first operating mode, the control unit generates first control signals that cause the actuating device to set the manipulator element to the first configuration.

• 출원번호 : EP2024/066044
• 출원인 : CARL ZEISS SMT GMBH
• 특허번호 :
• IPC : G03F-007/20(2006.01);G02B-026/08(2006.01);

The invention relates to a holding device (28) for a mirror element, in particular for a mirror element (19) for the reflection of EUV radiation (16), which has a ratio of length (L) to breadth (B) of more than 2:1, preferably more than 3:1, particularly preferably more than 4:1, in particular more than 10:1. The holding device (28) has a frame (29) with a plurality of holding elements (30) for laterally clamping the mirror element (19). The holding elements (30) have protruding sprung portions (32) for resiliently supporting the mirror element (19). The invention also relates to an optical assembly (27) having such a mirror element (19) and having a holding device (28), designed as described above, for holding the mirror element (19). The invention also relates to an EUV lithography system having at least one such optical assembly (27).

• 출원번호 : EP2024/066103
• 출원인 : CARL ZEISS SMT GMBH
• 특허번호 :
• IPC : G02B-007/182(2021.01);G02B-007/192(2021.01);G03F-007/00(2006.01);

The invention relates to a microscanner system comprising: a microscanner which is formed in a substrate, in particular in a semiconductor chip, and has a deflection element which is suspended so as to be rotatably oscillatable about at least one oscillation axis and has a surface designed as a mirror surface for deflecting electromagnetic radiation incident on the mirror surface; a radiation source, in particular a laser radiation source, for emitting an electromagnetic beam to be reflected at the deflection element; an encapsulation for encapsulating, in particular vacuum encapsulating, the microscanner, the encapsulation having a window region which is at least partially transparent to the beam after its deflection at the deflection element; and a deflection device having an at least partially reflective reflection surface for deflecting the electromagnetic beam, which can be emitted by the radiation source, onto the mirror surface. The radiation source is arranged and orientated such that a beam path of the beam at least partially passes through a radiation passage region in the substrate to the deflection device. Moreover, the deflection device is arranged in or on the encapsulation or is integrally formed therewith.

• 출원번호 : EP2024/066118
• 출원인 : OQMENTED GMBH
• 특허번호 :
• IPC : G02B-026/08(2006.01);G02B-026/10(2006.01);

• 출원번호 : 24181316.1
• 출원인 : Commissariat àl'Energie Atomique et aux EnergiesAlternatives;
• 특허번호 :
• IPC : H01L-027/146(2006.01);H01L-031/0216(2014.01);

PROBLEM TO BE SOLVED: To solve a problem in which rain intensity is often not sufficient to accurately assess driver visibility.SOLUTION: Provided is a rain sensor to be mounted on a first surface of a pane in a window of a house to detect a rain drop radius on an opposing second surface of the pane. The rain sensor comprises: at least one emitter for emitting electromagnetic radiation, directed from the first surface to the second surface to form at least one rain-sensitive area on the second surface; at least one receiver for sensing radiation emitted by the emitter and that has been internally reflected at the at least one rain-sensitive area, and for generating an output signal indicating information correlated with the presence of the rain drop and the rain drop radius on the rain-sensitive area; and a control unit that is adapted to calculate a minimal droplet radius indicating the rain drop radius based on the output signal and control closing of the window of the house, when the rain drop is present on the rain-sensitive area.SELECTED DRAWING: Figure 1

• 출원번호 : 2024094177
• 출원인 : TE CONNECTIVITY SENSORS FRANCE
• 특허번호 :
• IPC : G01W-001/14(2006.01);G01N-021/17(2006.01);B60S-001/08(2006.01);

Methods and systems are disclosed for generating an active oxygen species. A photoreactor has a reaction chamber, where an inlet to the reaction chamber is configured to be coupled to an oxygen source that contains molecular oxygen. An optical excitation source is optically coupled to the reaction chamber and is configured to generate radiation in an ultraviolet wavelength range. The radiation excites a proportion of the molecular oxygen in the reaction chamber, without the use of a plasma generator, to form atomic oxygen such that the atomic oxygen is able to react with the molecular oxygen in the reaction chamber to form ozone. An outlet from the reaction chamber is configured to emit a gas mixture comprising the atomic oxygen, the molecular oxygen, and the ozone.

• 출원번호 : IB2024/055722
• 출원인 : SILANNA UV TECHNOLOGIES PTE LTD
• 특허번호 :
• IPC : H01J-037/32(2006.01);H01L-021/67(2006.01);

Provided are a magnetic resonance imaging system and an operation method of a magnetic resonance imaging system that generate a reconstructed image with an improved signal-to-noise ratio. A magnetic resonance imaging system includes a magnetic resonance imaging apparatus, a processor, and a memory. The processor uses the magnetic resonance imaging apparatus to perform a plurality of imaging operations on the same slice of a subject in accordance with an imaging sequence, collects pieces of measurement data indicating nuclear magnetic resonance signals in correspondence with the plurality of imaging operations, acquires a common solution to be used in a case of generating a single final image in a real space from the pieces of measurement data collected in the plurality of imaging operations, and generates the final image by using the pieces of measurement data collected in the plurality of imaging operations and the common solution.

• 출원번호 : 18740470
• 출원인 : FUJIFILM Healthcare Corporation
• 특허번호 :
• IPC : G01R-033/561(2006.01);G01R-033/483(2006.01);G01R-033/56(2006.01);G01R-033/563(2006.01);G01R-033/565(2006.01);

Method and apparatus for annealing micro-scale or macro solar cells that can contain lithium. Heaters, a current that is applied in forward or reverse direction, or open-circuiting the cells are used optionally with a laser or other light source to increase the temperature of the cells to perform periodic anneals to recover energy conversion efficiency lost due to environmental conditions such as radiation damage and maintain desired operational conditions. While a small amount of energy is used for heating up the small thermal mass of the micro-cells and macro cells to the desired annealing temperature, much larger amounts of additional energy is harvested with the improved efficiency of the cells. Maintaining a desired temperature for operation of cells takes very little energy owing to the small thermal mass of the cells and controlled thermal conduction of the materials in contact with the cells.

• 출원번호 : 18740143
• 출원인 : mPower Technology, Inc.
• 특허번호 :
• IPC : H01L-031/18(2006.01);H01L-031/032(2006.01);H01L-031/042(2006.01);

A radiation imaging apparatus including a plurality of pixels arranged to form a plurality of pixel rows and a plurality of pixel columns and configured to generate and accumulate electric charges, a driving circuit configured to supply, to the plurality of pixels, a driving signal for selecting one of the plurality of pixels, a readout circuit configured to read out a signal based on the electric charges accumulated in the pixel selected by the driving signal, a control circuit configured to control the readout circuit and the driving circuit and an image generation circuit configured to generate a radiation image.

• 출원번호 : 18740345
• 출원인 : TAKENAKA, KATSURO
• 특허번호 :
• IPC : G01T-001/17(2006.01);G01T-001/24(2006.01);G01T-007/00(2006.01);