차세대 노광 기술을 적용한 경우에 노광 공정에 있어서의 감도나 해상도 등에 있어서 우수한 성능을 갖는 레지스트 패턴의 형성 방법 및 감방사선성 수지 조성물을 제공한다.(C) 감방사선성 산 발생제의 함유량이 0.1질량％ 이하인 레지스트막을 형성하는 공정 (1), 상기 레지스트막을 EUV, 또는 전자선(EB) 노광하는 공정 (2), 및 상기 공정 (2)에서 노광된 레지스트막을 현상하는 공정 (3)을 포함하는, 레지스트 패턴의 형성 방법.

• 출원번호 : 10-2024-7040554
• 출원인 : 제이에스알 가부시끼가이샤
• 특허번호 :
• IPC : G03F-007/004;C08F-212/14;C08F-220/10;G03F-007/038;G03F-007/039;G03F-007/20;

Organometallic solutions have been found to provide high resolution radiation based patterning using thin coatings. The patterning can involve irradiation of the coated surface with a selected pattern and developing the pattern with a developing agent to form the developed image. The patternable coatings may be susceptible to positive-tone patterning or negative-tone patterning based on the use of an organic developing agent or an aqueous acid or base developing agent. The radiation sensitive coatings can comprise a metal oxo/hydroxo network with organic ligands. A precursor solution can comprise an organic liquid and metal polynuclear oxo-hydroxo cations with organic ligands having metal carbon bonds and/or metal carboxylate bonds.

• 출원번호 : 18970543
• 출원인 : Meyers, Stephen T.
• 특허번호 :
• IPC : G03F-007/004(2006.01);G03F-007/09(2006.01);G03F-007/20(2006.01);G03F-007/30(2006.01);G03F-007/32(2006.01);

Birefringence in optical fibers is mitigated using optical frequency domain reflectometry (OFDR) having a coupling point optically connected to a reference arm with a first, single mode fiber segment and optically connected to a measurement arm having single mode optical segments and polarization maintaining optical segments. The measurement arm has a first optical circulator connected to the coupling point via a second, single mode fiber segment; a second optical circulator for sending optical radiation to a sensor; a single mode optical segment between the first optical circulator and the second optical circulator including a third, single mode fiber segment. The measurement arm has an outbound path including a first polarization maintaining optical segment between the first and second optical circulator for rotating a polarization of the optical radiation once relative to a second polarization maintaining optical segment between the first and second optical circulator.

• 출원번호 : 18970623
• 출원인 : Tongue, Alex
• 특허번호 :
• IPC : G01B-011/24(2006.01)

The disclosure relates to radio engineering, and more specifically, to a wide scan angle antenna array. Technical result consists in expanding the scanning range, increasing the efficiency of the antenna array and reducing losses. Antenna array is provided. The antenna array includes a plurality of antenna array elements, and a metasurface disposed above the antenna array, wherein the metasurface is a dielectric layer having, on a first side thereof, conductive elements configured to reflect part of radiation of the antenna array; the distance between the antenna array and the metasurface is based on an integer number of half wavelengths, an operating wavelength of the antenna array in a medium in the space between the antenna array and the metasurface, and a predetermined scanning angle of the antenna array.

• 출원번호 : 18970093
• 출원인 : SHEPELEVA, Elena Aleksandrovna
• 특허번호 :
• IPC : H01Q-021/06(2006.01);H01Q-015/00(2006.01);

A passive infrared (PIR) sensor system, includes a PIR sensor configured to produce an output signal in response to receiving infrared (IR) radiation, an electronic shutter positionable in a field of view (FOV) of the PIR sensor, wherein the electronic shutter includes a liquid crystal (LC) material, wherein the electronic shutter includes a first state providing a first transmissivity of IR radiation through the electronic shutter and a second state providing a second transmissivity of IR radiation through the electronic shutter that is less than the first transmissivity, and a shutter actuator configured to apply an actuation signal to the electronic shutter to actuate the electronic shutter between the first state and the second state.

• 출원번호 : 18970547
• 출원인 : The Texas A&M University System
• 특허번호 :
• IPC : G01J-005/0804(2022.01);G01J-005/00(2022.01);G01J-005/02(2022.01);G01J-005/04(2006.01);G01J-005/06(2022.01);G01J-005/0805(2022.01);G01J-005/0831(2022.01);G01J-005/0875(2022.01);G01J-005/34(2022.01);

A passively cooled stackable nuclear waste storage system may include a pair of vertically stacked radiation-shielded nuclear waste storage casks. Each cask has a cavity which holds a nuclear waste canister containing spent nuclear fuel or other high-level radioactive wastes. The lower cask may be founded on an above-grade concrete pad. The upper cask is vertically stacked on and detachably coupled to the lower cask. The upper cask comprises a perforated baseplate which establishes fluid communication between cavities of both casks and is configured to prevent radiation shine. One or both casks may include air inlet vents configured to draw ambient ventilation air into each respective cask cavity for cooling the nuclear waste. In operation, air is drawn inward into each cask cavity independently. Air heated in the lower cask rises into the upper cask where it mixes with air drawn into the upper cask and is returned to atmosphere.

• 출원번호 : 18968469
• 출원인 : HOLTEC INTERNATIONAL
• 특허번호 :
• IPC : G21F-005/10(2006.01);G21F-005/008(2006.01);G21F-005/12(2006.01);

A soundproof heat-dissipation cover (3) that covers a target object (2), and includes a heat-dissipation contact surface (10) having a contact part (12) contacting the target object (2). The density is 0.1 g/cm3 to 2.0 g/cm3, the thermal conductivity is 0.1 W/m to 2.0 W/mK, and the maximum height roughness (Rz) of the heat-dissipation contact surface (10) is 50 μm to 300 μm. With an air layer formed between the surface of the target object (2) and the heat-dissipation contact surface (10) of the soundproof heat dissipation cover (3), the contact area between the surface of the target object (2) and the heat-dissipation contact surface (10) of the soundproof heat-dissipation cover (3) can be reduced, the vibration received by the soundproof heat-dissipation cover (3) from the surface of the target object (2) can be suppressed, and the secondary radiation sound from the soundproof heat-dissipation cover (3) can be suppressed.

• 출원번호 : 18969215
• 출원인 : Sumitomo Riko Company Limited
• 특허번호 :
• IPC : G10K-011/168(2006.01);B29C-045/26(2006.01);F28F-013/18(2006.01);

A decorative sheet includes a primary film layer and a surface protective layer. The surface protective layer has a glossiness of 12 or less and has an uneven structure on a surface. The uneven structure has an RSm of 10 or more and 310 or less. The surface protective layer has a Martens hardness of 5 or more and 142 or less and contains an ionizing radiation-curable resin as a main material. The ionizing radiation-curable resin contains at least one of an alkylene repeating structure and an alkylene oxide repeating structure having a predetermined structure, and contains a resin obtained by polymerizing an acrylic monomer having 2 or more and 4 or less acryloyloxy groups. The acrylic monomer has 2 acryloyl groups, an acryloyl group chain length of 10 or more and 28 or less, and a viscosity of 100 mPa·s or less at 25° C.

• 출원번호 : 18969207
• 출원인 : TOPPAN HOLDINGS INC.
• 특허번호 :
• IPC : C09D-171/02(2006.01);C08J-003/28(2006.01);C09D-007/40(2018.01);

A method of operating a projection exposure apparatus for microlithography, comprises: heating an optical element of the projection exposure apparatus by irradiating a surface of the optical element with heating radiation during a break in operation in which the surface of the optical element is not irradiated by exposure radiation. An inhomogeneous temperature distribution which reduces aberrations of the projection exposure apparatus is created on a portion of the surface of the optical element during the heating in the break in operation, with the inhomogeneous temperature distribution being created by irradiating the portion with heating radiation with at least one continuous heating radiation profile formed by a beam shaping element. A related projection exposure apparatus for microlithography is disclosed.

• 출원번호 : 18966572
• 출원인 : LANGENHORST, Malte
• 특허번호 :
• IPC : G03F-007/00(2006.01)

A quartz glass fibre includes a fibre core of quartz glass produced by modified chemical vapor deposition (MCVD). A fluorine-doped radial layer is provided on the fibre core. A cladding layer of quartz glass contains chlorine and covers the fluorine-doped radial layer to define a hydrogen barrier around the fibre core in response to being irradiated by defect-generating ultra-violet (UV) radiation. The cladding layer has at least one of a combination of E′ defects and non-bridging oxygen hole center (NBOHC) defects and a combination of Si—OH and Si—H compounds.

• 출원번호 : 18966576
• 출원인 : HAEMMERLE, WOLFGANG
• 특허번호 :
• IPC : C03B-037/012(2006.01);C03B-037/018(2006.01);C03B-037/027(2006.01);C03C-003/06(2006.01);C03C-013/04(2006.01);C03C-025/6226(2018.01);