A broadband electrical substitution radiometer includes a substrate, an isolation layer disposed on the substrate, an electrical thermometer-heater disposed on the isolation layer, an electrical lead in electrical communication with the electrical thermometer-heater, selective removal of the substrate to form a suspended isolation layer, and an optical absorber disposed on the isolation layer. The isolation layer comprises a thermal isolation platform, a thermal isolation support beam, and a thermal isolation island. The electrical thermometer-heater is disposed on the thermal isolation island and detects a change in temperature and controllably heats the isolation layer. The electrical lead receives a signal from and provides power to the electrical thermometer-heater. The optical absorber absorbs radiation incident on the radiometer.
- 출원번호 : 18891767
- 출원인 : Yung, Christopher Shing-Yu
- 특허번호 :
- IPC : G01J-005/20(2006.01)