A sulfonium salt monomer having the formula (A). The sulfonium salt monomer can be used for a chemically amplified resist composition having a high solvent solubility, a high sensitivity, and a high contrast, and being improved in lithography properties such as EL, LWR, CDU, and DOF, particularly when processed by photolithography using high-energy radiation such as KrF excimer laser, ArF excimer laser, an electron beam (EB), or EUV.
- 출원번호 : 19285684
- 출원인 : Shin-Etsu Chemical Co., Ltd.
- 특허번호 :
- IPC : G03F-007/004(2006.01);C07C-381/12(2006.01);C08F-020/10(2006.01);G03F-007/00(2006.01);G03F-007/039(2006.01);