A metrology system is described. Metasurfaces are used to replace (or to augment) an existing demultiplexer to reduce the volume of the demultiplexer in the metrology system. A metasurface is configured to receive a diffracted radiation beam from a radiation source, and separate the beam into a narrower band sub-beam of radiation having a modified wavelength range, amplitude, pulse frequency, pulse time, polarization state or states, angular content, and/or spatial content in comparison to an incident wavelength range, amplitude, pulse frequency, pulse time, polarization state or states, angular content, and/or spatial content.
- 출원번호 : EP2024/061488
- 출원인 : ASML NETHERLANDS B.V.
- 특허번호 :
- IPC : G03F-009/00(2006.01);G03F-007/20(2006.01);G01N-021/956(2006.01);