The invention relates to a mirror module (10) for arranging in a clean room (12), in particular in an air-evacuated environment (14), wherein the mirror module (10) is designed to deflect electromagnetic waves (16), in particular laser radiation (18), having a mirror body (20) with at least one mirror surface (22) and a heat sink (24) which can be detachably arranged on the mirror body (20), wherein the heat sink (24) has a first heat-conducting surface (26) and the mirror body (20) has a second heat-conducting surface (28), wherein the first heat-conducting surface (26) is directly adjacent to the second heat-conducting surface (28) at least in some portions in order to dissipate thermal energy from the mirror body (20), wherein the mirror module (10) comprises a fastening device (30) which causes the first heat-conducting surface (26) to be detachably pressed against the second heat-conducting surface (28).
- 출원번호 : EP2025/075712
- 출원인 : TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING SE
- 특허번호 :
- IPC : G02B-007/18(2021.01);G03F-007/00(2006.01);G02B-005/08(2006.01);