A radiation-sensitive composition includes: an onium salt compound represented by formula (1), a polymer including a structural unit which includes an acid-dissociable group, and a solvent. A is a monovalent organic group having 1 to 40 carbon atoms; R1 and R2 are each independently a hydrogen atom, a cyano group, a nitro group, a hydroxy group, an alkoxy group, an alkylthio group, or the like, at least one of R1 and R2 is a cyano group or a nitro group; m1 is an integer of 1 to 8; L is *—COO—, *—OCO—, *—CO—, or *—OCOO—, * is a bond on a group A side, provided that when m1 is 1, L is *—COO—, *—CO—, or *—OCOO—; and Z+ is a monovalent radiation-sensitive onium cation.
- 출원번호 : 19372471
- 출원인 : JSR CORPORATION
- 특허번호 :
- IPC : G03F-007/004(2006.01);C07C-381/12(2006.01);