Provided are: a radiation-sensitive composition capable of exhibiting excellent sensitivity, CDU performance, DOF performance, pattern circularity, LWR performance, pattern rectangularity, and development defect suppression when forming a pattern; a pattern formation method; and an onium salt. This radiation-sensitive composition contains an onium salt represented by formula (1) (hereinafter, also referred to as an "onium salt (1)"), a polymer containing a structural unit (I) having an acid-dissociable group, and a solvent. (In formula (1), Ar is an (a1 + b1 +1)-valent aromatic ring. Ar is an (a2 + b2 +1)-valent aromatic ring. X and X are each independently a monovalent organic group having 1-20 carbon atoms, a cyano group, a nitro group, or a halogen atom. When multiple X and multiple X are present, the multiple X and the multiple X are each identical to or different from each other. Y is a monovalent organic group having 4-20 carbon atoms and bonded via Ar and -O-, -S-, or-SO-, or a monovalent perfluoroalkyl group having 1-20 carbon atoms. When multiple Y are present, the multiple Y are identical to or different from each other. Y is a monovalent organic group having 4-20 carbon atoms and bonded via Ar and -O-, -S-, or -SO-, or a monovalent perfluoroalkyl group having 1-20 carbon atoms. When multiple Y are present, the multiple Y are identical to or different from each other. L is a single bond or a divalent linking group having 1-5 carbon atoms. a1, a2, b1, and b2 are each independently an integer of 0-5. When the aromatic ring of Ar is a benzene ring, b1 + b2 ≥ 1.)
- 출원번호 : JP2024/024568
- 출원인 : JSR CORPORATION
- 특허번호 :
- IPC : G03F-007/004(2006.01);C07C-063/04(2006.01);C07C-065/21(2006.01);C07C-255/56(2006.01);C07C-317/14(2006.01);C07D-207/34(2006.01);C07D-209/30(2006.01);C07D-209/88(2006.01);C07D-307/56(2006.01);C07D-307/79(2006.01);C07D-307/88(2006.01);C07D-317/22(2006.01);C07D-317/62(2006.01);C07D-317/72(2006.01);C07D-333/28(2006.01);C07D-333/62(2006.01);G03F-007/20(2006.01);G03F-007/038(2006.01);G03F-007/039(2006.01);